| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a single crystal production apparatus which can quickly detect leakage of melt even when a small amount of raw material melt leaks during the growth of a single crystal by the Czochralski method, and to provide a method for detecting the leakage of melt. <P>SOLUTION: This single crystal production apparatus 1 used for pulling a single crystal from raw material melt 4 accommodated in a crucible 5 by the Czochralski method at least includes a distortion amount-measuring device 11 for measuring the distortion amount of a supporting spindle 7, attached to the supporting spindle 7 for supporting the crucible 5. The distortion amount of the supporting spindle 7 is measured with the distortion amount measuring device 11. The amount of the raw material melt in the crucible 5 is calculated from the measured distortion amount of the supporting spindle 7 to determine the decrement of the amount of the raw material melt. When the decrement of the amount of the raw material melt is larger than the melt decrement by crystal growth, the difference is detected as the leakage of melt. <P>COPYRIGHT: (C)2012,JPO&INPIT |
