| 摘要 |
In a first optical system (10), light from a measurement optical input section (11) is divided at a BS (13) and guided to a moving mirror (15) and a fixed mirror (14). The light obtained by reflection at the moving mirror (15) and the fixed mirror (14) is combined at the BS (13) to form first interference light which is guided to a first optical detector (17). The moving mirror (15) is moved in the direction of the optical axis of the incoming light by means of a drive mechanism (18). An inclination correction section (100) implements drive for the fixed mirror (14) for example, in order to correct the relative inclination of the light reflected by the moving mirror (15) and the light reflected by the fixed mirror (14), said relative inclination being produced by the inclination of the moving mirror (15) during drive implemented by the drive mechanism (18). The drive for the moving mirror (15) implemented by the drive mechanism (18) is resonant drive, and the drive for the fixed mirror (14) implemented by the inclination correction section (100) is non-resonant drive. |
