METHOD AND APPARATUS FOR BOTTOM-UP PROCESSING OF A STRUCTURE USING AN ADHESION SYSTEM HAVING FINE CILIARY

摘要

Disclosed are a method and apparatus for bottom-up processing of a structure using an adhesion system having fine ciliary, which enable the structure to be significantly conveniently attached/detached, and which support the structure in a stable and firm manner. For this, the method and apparatus for bottom-up processing of a structure using an adhesion system having fine ciliary are provided, wherein the method comprises a step of attaching an upper surface of the structure using the adhesion system having fine ciliary and a step of processing a bottom surface of the structure from the bottom to the top of the structure. According to the present invention, uniform support force can be provided to the whole surface of the structure during processing, to thereby prevent a portion of the structure from drooping, and thus reducing the defective rate of finished products.