<p>Disclosed is a processing facility which has a plurality of process chambers (21) disposed in one plane on a process floor (1) and a distribution floor (2) provided above the process floor to transport a carrier container (C). Furthermore, a delivery opening (22) is formed on a ceiling (11) between the process floor (1) and the distribution floor (2), so that an automated guided vehicle (5) travelling on the distribution floor (2) delivers the carrier container (C) between the process floor (1) and the distribution floor (2) through the delivery opening (22). Furthermore, a shelf (71) is provided on the distribution floor (2) to place the carrier container (C) along the guiding route on which the automated guided vehicle (5) travels. This has the effects of being capable of providing a processing facility which has a high degree of flexibility in planning the layout of a factory.</p>
