| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas conveying device selectively conveying gas to a plurality of directions different from each other. <P>SOLUTION: In this gas conveying device, insulative support plates 21, 22 are respectively disposed on two planes perpendicular to a y-axis, and a plurality of linear electrodes 30 are disposed in the y-axis direction with the insulative support plates 21, 22 as support materials. A dielectric layer is formed on the surface of each linear electrode 30. Voltage pulses having a plurality of phases wherein voltages change to the linear electrodes arranged in a prescribed direction inside an xz plane perpendicular to the y-axis at a period of a prescribed time are applied to the plurality of linear electrodes 30. A direction in which the phases of the voltage pulses applied to the linear electrodes advance can be selectively controlled, and the gas is conveyed to the direction to which the phases of the voltage pulses advance. <P>COPYRIGHT: (C)2012,JPO&INPIT |
