摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of mounting, on a needle-like sample, gold fine particles which have a diameter of several nanometers and which are used as a mark for positioning for transmission type electron microscope (TEM) tomography in which a series of rotational images are photographed and subjected to image processing by the TEM. <P>SOLUTION: When the sample is processed into a needle shape with a focused ion beam, a mask 10 is processed and formed at the same time. Then when the gold fine particles are vapor-deposited at a predetermined angle on the needle-like sample having the mask 10 nearby, the gold fine particles stick on a specified region of the needle-like sample and do not stick on other regions because of the mask, so that the region on which the gold fine particles stick and the regions on which the gold fine particles do not stick can be separated in a vapor deposition device. <P>COPYRIGHT: (C)2012,JPO&INPIT |