PRODUCTION OF ULTRAFINE PARTICLES IN A PLASMA SYSTEM HAVING CONTROLLED PRESSURE ZONES

摘要

A system and method for making ultrafine particles are disclosed. A high temperature plasma (22) is generated at an inlet end of a plasma chamber (10) into which precursor materials are introduced. A converging member (30) is located adjacent an outlet end (40) of the plasma chamber (10). During operation, a substantially constant pressure and/or material flow pattern is maintained to reduce or eliminate fouling of the system.