| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a hollow structure which enables a fine hollow structure having openings on both upper and lower sides to be formed stably and rapidly in a single process of forming the hollow structure. <P>SOLUTION: In Fig.1, (a) a material 3 prepared by adding a surfactant to an unhardened UV-curable resin is applied onto the first substrate 4 arranged with two or more concave parts 5 by e.g. a slit-coating or spin-coating method, and the pressure of the surroundings is reduced. (b) A fine honeycomb-like hollow structure is formed by expanding the gas of the hollow parts through the pressure of the gas held between the concave parts 5 and the UV-curable resin so as to cause the UV-curable resin covering the hollow parts to extend in the direction perpendicular to the surface of the substrate while parts of the UV-curable resin regulate mutually. (c) The resin of division walls erecting vertically on the substrate of the fine hollow structure can be hardened selectively by using a UV drawing device capable of irradiating selectively with UV rays as a selective hardening means 2. (d) Being not hardened, the ceiling parts of the hollow structure are to serve openings. <P>COPYRIGHT: (C)2012,JPO&INPIT |
