| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spatial light device capable of improving variable attenuation accuracy and stability of operations. <P>SOLUTION: Light transmittance indicating the ratio of signal light made incident on an output port 12 is made maximum when a voltage is applied to an electrode of an MEMS mirror device 100 and a mirror 103 is turned. Thus, since the change of the light transmittance becomes nearly linear over the whole range of the voltage applied to the electrode, the variable attenuation accuracy and the stability of operations are improved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
