发明名称 PIEZORESISTANCE PRESSURE SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoresistance pressure sensor capable of measuring pressure with high sensitivity and high accuracy, by suppressing variation in electrical conduction due to heat fluctuation of a piezoresistive element without degradation in measurement sensitivity. <P>SOLUTION: Piezoresistance parts R1,R2,R3,and R4 are arranged on a diaphragm 31 in vicinity of a boundary between the diaphragm 31 and a support part 32. A pressure can be thereby measured with high sensitivity. In each of the piezoresistance parts R1,R2,R3,and R4, an arrangement region of a group of piezoresistive elements has the same area and the same outer shape. Temperature distribution among the piezoresistance parts R1,R2,R3,and R4 is thereby allowed to be uniform, resulting in suppression of variation in electrical conduction due to heat fluctuation of the piezoresistive elements. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012002646(A) 申请公布日期 2012.01.05
申请号 JP20100137290 申请日期 2010.06.16
申请人 MITSUMI ELECTRIC CO LTD 发明人 OIZUMI NORIKAZU
分类号 G01L9/00;B81B3/00;H01L29/84 主分类号 G01L9/00
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