摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoresistance pressure sensor capable of measuring pressure with high sensitivity and high accuracy, by suppressing variation in electrical conduction due to heat fluctuation of a piezoresistive element without degradation in measurement sensitivity. <P>SOLUTION: Piezoresistance parts R1,R2,R3,and R4 are arranged on a diaphragm 31 in vicinity of a boundary between the diaphragm 31 and a support part 32. A pressure can be thereby measured with high sensitivity. In each of the piezoresistance parts R1,R2,R3,and R4, an arrangement region of a group of piezoresistive elements has the same area and the same outer shape. Temperature distribution among the piezoresistance parts R1,R2,R3,and R4 is thereby allowed to be uniform, resulting in suppression of variation in electrical conduction due to heat fluctuation of the piezoresistive elements. <P>COPYRIGHT: (C)2012,JPO&INPIT |