HIGH THROUGHPUT SOLAR CELL ABLATION SYSTEM

摘要

A solar cell is formed using a solar cell ablation system (100). The ablation system (100) includes a single laser source (102) and several laser scanners (104). The laser scanners (104) include a master laser scanner, with the rest of the laser scanners (104) being slaved to the master laser scanner. A laser beam from the laser source (102) is split into several laser beams, with the laser beams being scanned onto corresponding wafers using the laser scanners (104) in accordance with one or more patterns. The laser beams may be scanned on the wafers using the same or different power levels of the laser source (102).