| 摘要 |
Disclosed is a method of producing a sensor device and a sensor device that prevent the corrosion of metal electrodes of a sensor due to humid ambient air, and that prevent the sensor from warping due to a resin seal, thereby reducing the effects on the sensor characteristics. The method of producing the sensor device involves: a fixed section, a movable section positioned on the inside of the fixed section, a flexible section connecting the fixed section and the movable section, and a sensor having a plurality of metal electrodes, are disposed on a substrate; the plurality of metal electrodes of the sensor and a plurality of terminals of the substrate are electrically connected by bonding wires; and areas that are connected with the bonding wires of a plurality of metal electrodes of the sensor are covered with a resin in such a manner that a portion of the bonding wires between the plurality of metal electrodes and the plurality of terminals is exposed. |
