| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron emission element which includes: a gate 5 provided on an upper surface of a step forming member 2; a recess 7 formed directly under the gate 5 on a side surface 20 of the step forming member 2; and a cathode 6 which is provided on the side surface 20 of the step forming member 2 and has a projection 6a projecting toward an upper edge from a lower edge of the recess 7 at the upper end, where electron emission efficiency is improved, and at the same time, a resistance layer for current limitation for suppressing variations in current flowing through the element is incorporated as a part of a constituent member of the element. <P>SOLUTION: In the electron emission element, on the side surface 20 of the step forming member 2, an inclination angle θ2 of a lower stage 22 covering from an intermediate part 30 in a height direction to the lower end is larger than the inclination angle θ1 of an upper stage 21 covering from the lower edge of the recess 7 to the intermediate part 30 in the height direction. Besides, an electrical resistance value of a lower stage cathode portion 6c forming a portion of the lower stage 22 of a cathode 6 is larger than that of an upper stage cathode portion 6b forming a portion of the upper stage 21 of the cathode 6. <P>COPYRIGHT: (C)2012,JPO&INPIT |
