METHOD FOR MANUFACTURING SEMICONDUCTOR OPTICAL ELEMENT, LASER MODULE, AND OPTICAL TRANSMISSION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor optical element which improves the characteristics of a semiconductor optical element with a buried hetero structure by providing a structure capable of reducing parasitic capacitance, and to provide a laser module and an optical transmission apparatus.

SOLUTION: The invention relates to a method for manufacturing the semiconductor optical element that has a modulator portion for modulating and emitting light input along an emitting direction. The modulator portion includes: a quantum well layer containing aluminum; a semiconductor multi-layer having a mesa-stripe structure; and a semiconductor buried layer which is disposed on both sides of the semiconductor multi-layer and adjacent to them, and in which impurities are added. The method comprises: the step of forming the mesa-stripe structure by removing a predetermined area from the semiconductor multi-layer; the step of cleaning both surfaces of the semiconductor multi-layer by use of chlorine gas; and the step of forming the semiconductor buried layers on both sides of the semiconductor multi-layer, in this order.

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