| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor capable of preventing a layered part formed on a diaphragm structure from being peeled off due to shock, vibration or the like and having excellent productivity. <P>SOLUTION: The gas sensor includes: gas detection elements 3, 4 which respectively include diaphragm structures 39D, 49D, layered parts 31, 41 including gas detection layers formed on insulating layers of the diaphragm structures 39D, 49D, a pair of detection electrodes 36A, 36B, 46A, 46B mutually connected through respective gas detection layers, and a pair of detection pads 33, 43 installed along electrode extraction sides 3P, 4P and connected to the detection electrodes 36A, 36B, 46A, 46B; and a wiring board 2 on which a board side pad 23 connected to the detection pads 33, 43 is formed on the surface and the plurality of gas detection elements 3, 4 are mounted so as to be aligned. The gas sensor 10 further includes: first adhesive layers 61, 62 formed between the undersurfaces R1 of the gas detection elements 3, 4 and the surface of the wiring board 2; and a second adhesive layer 63 formed between the undersurfaces R2 of the gas detection elements 3, 4 and the surface of the wiring board 2 across the undersurfaces R2 of the adjacent gas detection elements 3, 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
