| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal type infrared detection element having an improved sensitivity obtained by suppressing heat conduction from an infrared detection part to a substrate without using a hollow structure, and effectively changing the temperature of the infrared detection part at the time of an infrared incident. <P>SOLUTION: An infrared detection element is provided with a substrate 11, a thermal insulation layer 12 that is formed on the substrate and contains a space part, and a thermal type infrared detection layer 14 that detects infrared radiation according to the temperature change. <P>COPYRIGHT: (C)2012,JPO&INPIT |
