METHOD FOR OPERATING DETECTOR WITHIN GAS CONDITIONED ENVIRONMENT

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus that is provided with a projection lens system having a gas conditioned environment that is less sensitive to ambient atmosphere variations.

SOLUTION: A lithographic apparatus is disclosed. The lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system includes a housing and a plurality of optical elements arranged in the housing. The lithographic apparatus also includes an inlet for feeding conditioned gas to the housing and a gas exhaust for exhausting the conditioned gas from the housing for providing a gas conditioned environment in the housing. At least one gate is provided for providing communication of the gas conditioned environment with ambient atmosphere. The gate is arranged to provide a predetermined leakage of the conditioned gas to the ambient atmosphere.

COPYRIGHT: (C)2012,JPO&INPIT