| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power semiconductor device that allows characteristics of a semi-insulating film to be easily measured. <P>SOLUTION: The power semiconductor device comprises: a substrate; a surface electrode formed on the substrate; a plurality of guard rings formed in the substrate so as to surround the surface electrode; a plurality of conductors formed for each of the plurality of guard rings; a semi-insulating film integrally covering the plurality of conductors; and an electrical conductivity monitor formed at a more outer peripheral side than the guard rings in the substrate. The electrical conductivity monitor measures the electrical conductivity of a semi-insulating film for measurement formed from the same material as the semi-insulating film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
