| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrier device capable of stably conveying a substrate at a high speed even when conveying the substrate in a vertical direction, and vacuum treatment equipment. <P>SOLUTION: The substrate carrier device includes trays 4a and 4b for holding the substrates 3a and 3b, a carrier 20 moving along a conveying passage 7 via a bearing (guiding member) 6, and a driving means for moving the carrier 20 along the conveying passage 7. The drive of the driving means makes the substrate carried along the conveying passage in the vertical direction with respect to a surface including the conveying passage. In that case, a vibration isolating material 8 is disposed along the conveying passage 7 in a portion, which is brought into contact with a floor surface, of the conveying passage 7, so as to suppress vibrations when the carrier 20 conveys the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
