| 摘要 |
<P>PROBLEM TO BE SOLVED: To wash a holding pad composed of porous ceramic with higher detergency than before. <P>SOLUTION: The device washes a holding part 3 of a holding pad 1 composed of porous ceramic by repeating the following processes one after another at every fixed time: a two-fluid jet cleaning process where the two-fluid which is a mixed fluid of water and air is jetted and debris jammed in a hole of the holding part 3 is washed out; and a suction cleaning process to suction the holding part 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
