MANUFACTURING APPARATUS AND METHOD OF GRAPHENE

摘要

PURPOSE: An apparatus for manufacturing graphene and a method for the same are provided to minimize the damage of a substrate due to high temperature heat by expanding the selection range of catalytic metals for a catalyst layer. CONSTITUTION: A gas supplying part(10) supplies gas containing carbon. A gas heating part(20) heats gas supplied from the gas supplying part. A substrate(90) with a catalyst layer is arranged in a depositing chamber(50). A introducing pipe(40) introduces the gas from the gas heating part into the depositing chamber. The gas heating part includes a gas chamber(21) and a gas heating unit. A method for manufacturing graphene includes the following: The substrate is transferred to the depositing chamber. The gas containing carbon is supplied into the gas chamber. The gas received in the gas chamber is heated, and the heated gas is introduced into the depositing chamber in order to synthesize graphene on the substrate.