发明名称 METHOD OF FORMING FINE STRUCTURE USING PARTIAL CURING
摘要 <p>PURPOSE: A fine structure formation method which uses a partial hardening process is provided to attach a target material by partial hardening a hardening polymer, thereby easily arranging various shapes of fine structures on a wide substrate. CONSTITUTION: A polymer pattern which includes a partial hardening layer is arranged on a first base substrate(S1). The first base substrate is installed in a target substrate in which a target material is coated in order to mutually connect the target material and partial hardening layer(S2). The partial hardening layer is completely hardened in order to attach the target material to the partial hardening layer(S3). The first base substrate is separated from the target substrate(S4).</p>
申请公布号 KR101102012(B1) 申请公布日期 2012.01.04
申请号 KR20100107872 申请日期 2010.11.01
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 KIM, JAE KWAN;PARK, SEONG JE;KIM, SA RAH;KIM, KI DON;LEE, JI HYE;CHOI, JUN HYUK;CHOI, DAE GEUN;SUH, KAHP YANG;JEONG, JUN HO
分类号 H01L21/027 主分类号 H01L21/027
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