| 摘要 |
PURPOSE: An object inspection method is provided to reduce noises in a shadow area and improve the reliability in a test on the mounting state of an object by compensating shadow regions in visibility maps using amplitude information. CONSTITUTION: An object inspection method is as follows. A pattern light is irradiated N times in several directions on a substrate, in which an object to be measured is formed, and the substrate is photographed by a camera(S110). Visibility maps of the substrate according to direction using the N images of each direction(S120). Shadow areas of the object according to direction are obtained from the visibility maps(S130). The obtained shadow areas are compensated(S140). The compensated shadow areas are merged to create a shadow map(S150).
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