| 摘要 |
PURPOSE: A ceramic electrostatic chuck is provided to simplify a manufacturing process and configuration by forming an electrode for electrostatic generation on the inner side of the ceramic electrostatic chuck using a plasma spraying method. CONSTITUTION: An insulating layer(70) is formed on a substrate(80). A bottom heater electrode(60) is formed on the insulating layer. A ceramic heating element(50) is formed on the bottom heater electrode. A top heater electrode(40) is formed on the ceramic heating element. A clamping electrode(20) is formed on the top heater electrode. A dielectric layer(10) is formed on the clamping electrode.
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