APPARATUS FOR TRANSFERRING AND FIXING A SUBSTRATE

摘要

PURPOSE: A substrate transfer and fixing apparatus is provided to prevent the damage and the deformation of a substrate by transferring the substrate as a state adhering closely to the bottom surface of the substrate using a porosity cushion material. CONSTITUTION: The deformation supporting part(100) of a porosity cushion material supports a substrate(20). A fixed supporting part(200) forms an accommodating groove(210) in center. The fixed supporting part forms a discharge hole(220) which inhales and discharges air to the floor side of the accommodating groove. A vacuum suction part(300) is connected to the lower side of the fixed supporting part. The vacuum suction part inhales the air of the accommodating groove in order to create a vacuum in the accommodating groove.