Method of electron diffraction tomography

摘要

The invention describes a method for electron diffraction tomography in a Transmission Electron Microscope. Known methods involve using Scanning Transmission Electron Microscope, and use the scanned beam for STEM diffraction. The invention proposes to form the diffraction patterns with a stationary beam (200) with a diameter slightly larger than the crystal (202), as a result of which a TEM without STEM unit can be used. Finding the crystal (202) is done in TEM mode. Advantages of the method according to the invention are: a TEM without scanning unit can be used, and the diffraction volume is not depending on the orientation of the crystal (202), as the whole crystal (202) is illuminated while obtaining the diffraction pattern.