发明名称 |
Multiple zone carrier head with flexible membrane |
摘要 |
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion. |
申请公布号 |
US8088299(B2) |
申请公布日期 |
2012.01.03 |
申请号 |
US20100955803 |
申请日期 |
2010.11.29 |
申请人 |
CHEN HUNG CHIH;OH JEONGHOON;SIU TSZ-SIN;BREZOCZKY THOMAS;ZUNIGA STEVEN M.;APPLIED MATERIALS, INC. |
发明人 |
CHEN HUNG CHIH;OH JEONGHOON;SIU TSZ-SIN;BREZOCZKY THOMAS;ZUNIGA STEVEN M. |
分类号 |
C23C16/00;B24B37/04;B44C1/22;C23F1/00;H01L21/00;H01L21/68 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|