发明名称 Illumination means and inspection means having an illumination means
摘要 An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.
申请公布号 US8087799(B2) 申请公布日期 2012.01.03
申请号 US20080286253 申请日期 2008.09.29
申请人 HAHN KURT;HOFMANN MICHAEL;KRAMPE-ZADLER CHRISTOF;VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 HAHN KURT;HOFMANN MICHAEL;KRAMPE-ZADLER CHRISTOF
分类号 F21V1/04 主分类号 F21V1/04
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