| 摘要 |
The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and Piezoelectric Transducer (PZT) technology to create a digitally programmable dynamically tilting specimen holder integrated into a standard transmission electron microscope stage. In this invention, specimens can be tilted using a MEMS/PZT-actuated specimen holder to between 10 and 25° for stereo pairs and at higher angles (up to 90°) for tomography applications. In one embodiment, the specimen cradle may be effectively rotated 360° about the Y axis, enabling virtually the complete three-dimensional mapping of a specimen. By incorporating closed-loop capacitive feedback sensors for sub-nanometer positional control, the specimen holder allows rapid movement and full digital control of specimen tilt, enabling a number of novel techniques including real-time stereo imaging, auto crystal plane alignment and zero loss imaging.
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