发明名称 |
Evaporative system for solar cell fabrication |
摘要 |
A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
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申请公布号 |
US8087380(B2) |
申请公布日期 |
2012.01.03 |
申请号 |
US20090610187 |
申请日期 |
2009.10.30 |
申请人 |
BLUCK TERRY;BARNES MICHAEL S.;FAIRBAIRN KEVIN P.;INTEVAC, INC. |
发明人 |
BLUCK TERRY;BARNES MICHAEL S.;FAIRBAIRN KEVIN P. |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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