发明名称 METHOD FOR HEATING A SUBSTRATE OF SOLAR CELL
摘要 <p>Disclosed is a method for heating a substrate of a solar cell. The method includes: providing a single or poly crystalline substrate; heating the substrate at atmosphere by a non-contact heater; and forming a thin film, which includes amorphous silicon or silicon alloy, on the substrate.</p>
申请公布号 KR101101943(B1) 申请公布日期 2012.01.02
申请号 KR20100050957 申请日期 2010.05.31
申请人 发明人
分类号 H01L31/042;H01L21/324 主分类号 H01L31/042
代理机构 代理人
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