发明名称 PARTICLE DETECTOR
摘要 PURPOSE: A particle detecting apparatus is provided to enable 360-degree detection of particles in a three-dimensional space and analyze the existence and position of particles within a short time. CONSTITUTION: A particle detecting apparatus(1000) comprises a laser generating unit(100), a converting unit(200), and a particle detecting unit(300). The laser generator generates a laser beam. The converting unit changes the laser beam into the three-dimensional beam. The particle detecting unit analyzes scattered light which is generated by collision of the three-dimensional beam with particles. The converting unit comprises a plane beam expansion part(220) and a stereoscopic beam expansion part(240). The plane beam expansion part expands the laser beam into the two-dimensional beam. The stereoscopic beam expansion part expands the plane beam into the three-dimensional beam. The plane beam expansion part expands the laser beam into the radial-shaped plane beam.
申请公布号 KR20120000340(A) 申请公布日期 2012.01.02
申请号 KR20100060661 申请日期 2010.06.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, JIN;KIM, HEE BOM
分类号 G01N21/47;G01N15/02;G01N21/88;H01L21/66 主分类号 G01N21/47
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