PARALLELISM ADJUSTING MECHANISM OF PROBE CARD AND INSPECTION APPARATUS

摘要

PURPOSE: A parallel adjustment device of a probe card and an inspection apparatus thereof are provided to use a head plate which has generality. CONSTITUTION: A lifting device(17A) lifts a head plate(15) in order to adjust a parallel degree of a wafer(W) on a wafer chuck(11) placed in a lower side of a probe card(12) and the probe card. The lifting device includes a moving body(17C), a lifting body(17E), and an operation device(17F). The moving body includes an inclined plane and is moved along the upper surface of a support pillar(16). The lifting body is connected to the head plate and arranged in order to be able to be lifted along the inclined plane of the moving body. The operation device moves the moving body along the upper surface of the support pillar.