发明名称 |
METHOD FOR COLLECTING COOLANT |
摘要 |
PURPOSE: A method for collecting a coolant is provided to control the degradation of the filtration rate of coolant by reiterating backwashing only using air. CONSTITUTION: Coolant, which is used for a slicing process(1), is integrally accepted to a collection basin(2). The coolant is delivered from the collection basin to a ceramic film(4) with a filtering pump(3). The diameter of the film hole of the ceramic film is 1μm-3μm. The liquid passing through the ceramic film is delivered to a filtering coolant tub(5). The concentration liquid passing through the primary side of the ceramic film is carried to the collection basin with a pipe(6). |
申请公布号 |
KR20120000502(A) |
申请公布日期 |
2012.01.02 |
申请号 |
KR20110058125 |
申请日期 |
2011.06.15 |
申请人 |
NGK INSULATORS, LTD.;NGK FILTECH, LTD. |
发明人 |
AMAIKE HIDEO;KOSAKA SHINITI;KUBOTA KATUFUMI |
分类号 |
H01L21/301;B24B27/06;B24B57/02 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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