发明名称 METHOD FOR COLLECTING COOLANT
摘要 PURPOSE: A method for collecting a coolant is provided to control the degradation of the filtration rate of coolant by reiterating backwashing only using air. CONSTITUTION: Coolant, which is used for a slicing process(1), is integrally accepted to a collection basin(2). The coolant is delivered from the collection basin to a ceramic film(4) with a filtering pump(3). The diameter of the film hole of the ceramic film is 1μm-3μm. The liquid passing through the ceramic film is delivered to a filtering coolant tub(5). The concentration liquid passing through the primary side of the ceramic film is carried to the collection basin with a pipe(6).
申请公布号 KR20120000502(A) 申请公布日期 2012.01.02
申请号 KR20110058125 申请日期 2011.06.15
申请人 NGK INSULATORS, LTD.;NGK FILTECH, LTD. 发明人 AMAIKE HIDEO;KOSAKA SHINITI;KUBOTA KATUFUMI
分类号 H01L21/301;B24B27/06;B24B57/02 主分类号 H01L21/301
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