| 摘要 |
PURPOSE: A method for depositing inline type of e-beam way is provided to improve marketability and manufacturing productivity by forming the first chamber, second chamber and third chamber in parallel with each other. CONSTITUTION: A method for depositing inline type of e-beam way comprises next steps. First, second, and third chambers(10,20,30) are formed in an inline type. A carrier(5), in which a product is mounted, is installed in a first chamber and pumps under vacuum conditions. The carrier of the first chamber inside is transferred to a second chamber. The product of the carrier carried to the second chamber is evaporated to the e-beam mode. The carrier completed the evaporation of the second chamber inside is transferred to the third chamber.
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