AN IMPROVED FLOATING STAGE AND A SUBSTRATE FLOATING UNIT AND A COATING APPARATUS HAVING THE SAME

摘要

PURPOSE: An improved floating stage and a substrate floating unit and a coating apparatus having the same are provided to prevent the vibration of a flotation stage in ejecting and taking in air by fixing the floating stage to a base member. CONSTITUTION: In an improved floating stage and a substrate floating unit and a coating apparatus having the same, a plate(P) is provided in a loading area, a lower part of a coating region and an unloading region. First to third air outlets(288) and first to the third air inlets(290) are formed in the plate. The plate is fixed to the base member(B). An air supply route is connected to the plural air outlets. An air supply unit is connected to the air supply route. An air inlet route is connected to a plurality of second air inlets. A vacuum pumping apparatus is connected to the air inlet route. .