| 摘要 |
<p>PURPOSE: A substrate rotation unit and a substrate transfer apparatus including the same are provided to stably arrange a cable in a substrate rotary unit by forming dual twist chains to be bent. CONSTITUTION: In a substrate rotation unit and a substrate transfer apparatus including the same, first and second cable-bundles(320,325) perform at least one of electrical control and temperature control The first and second cable-bundles passes through the first and second twist chains(310,315) respectively. The first and second twist chains comprises an upper chain part(311), a lower-chain part(312), and an middle chain unit(313) A superstructure(305) transfers torque to the substrate and is arranged in the upper part of the first and second twist chains. A torque supply unit(360) moves one of one side of the upper chain part and the other side of a lower chain part.</p> |
