发明名称 PLATING METHOD
摘要 Disclosed is a plating method including: performing plating on a plating surface of a plating substrate with a cathode electrode contacting an area in an outer circumferential section of the plating substrate where the cathode electrode is to be contacted, the plating substrate being provided with a dummy plating area between the area where the cathode electrode is to be contacted and a product area on the plating surface of the plating substrate, by supplying a plating solution to the plating surface of the plating substrate and applying electric current between the cathode electrode and an anode electrode via the plating solution.
申请公布号 US2011315555(A1) 申请公布日期 2011.12.29
申请号 US201113165865 申请日期 2011.06.22
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 SAITO HIROKAZU;SAMESHIMA HIDEYUKI
分类号 C25D5/02 主分类号 C25D5/02
代理机构 代理人
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