发明名称 SRAM MEMORY CELL BASED ON TRANSISTORS OF INCREASED EFFECTIVE GATE WIDTH AND PRODUCTION PROCESS
摘要 <p>The SRAM memory cell is equipped with two access transistors and two inverters each comprising two transistors. An access transistor is associated with an inverter. Each transistor comprises a semiconductor zone (2) that protrudes from a semiconductor layer (5). The protrusion comprises a main wall (2a) and a sidewall (2b). Each transistor comprises a gate electrode (3', 3") separated from the semiconductor zone (2) by a gate insulator. The gate electrode (3', 3") covers the main wall (2a) of the protruding zone (2) and partially covers the sidewall (2b) of the protruding zone to a covering depth. The covering depth of the sidewalls is different between the two transistors (6a) of the inverter and is also different from the covering depth of the access transistor.</p>
申请公布号 WO2011161338(A1) 申请公布日期 2011.12.29
申请号 WO2011FR00361 申请日期 2011.06.23
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES (CEA);STMICROELECTRONICS (GRENOBLE 2) SAS;JAUD, MARIE-ANNE;GUILLAUMOT, BERNARD;THOMAS, OLIVIER 发明人 JAUD, MARIE-ANNE;GUILLAUMOT, BERNARD;THOMAS, OLIVIER
分类号 H01L21/336;H01L21/8244;H01L27/11;H01L29/10;H01L29/78 主分类号 H01L21/336
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