发明名称 |
SRAM MEMORY CELL BASED ON TRANSISTORS OF INCREASED EFFECTIVE GATE WIDTH AND PRODUCTION PROCESS |
摘要 |
<p>The SRAM memory cell is equipped with two access transistors and two inverters each comprising two transistors. An access transistor is associated with an inverter. Each transistor comprises a semiconductor zone (2) that protrudes from a semiconductor layer (5). The protrusion comprises a main wall (2a) and a sidewall (2b). Each transistor comprises a gate electrode (3', 3") separated from the semiconductor zone (2) by a gate insulator. The gate electrode (3', 3") covers the main wall (2a) of the protruding zone (2) and partially covers the sidewall (2b) of the protruding zone to a covering depth. The covering depth of the sidewalls is different between the two transistors (6a) of the inverter and is also different from the covering depth of the access transistor.</p> |
申请公布号 |
WO2011161338(A1) |
申请公布日期 |
2011.12.29 |
申请号 |
WO2011FR00361 |
申请日期 |
2011.06.23 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES (CEA);STMICROELECTRONICS (GRENOBLE 2) SAS;JAUD, MARIE-ANNE;GUILLAUMOT, BERNARD;THOMAS, OLIVIER |
发明人 |
JAUD, MARIE-ANNE;GUILLAUMOT, BERNARD;THOMAS, OLIVIER |
分类号 |
H01L21/336;H01L21/8244;H01L27/11;H01L29/10;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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