PYROELECTRIC INFRARED SENSOR ELEMENT AND INFRARED SENSOR USING THE SAME

摘要

A pyroelectric infrared sensor element is equipped with a pyroelectric element comprising: an infrared absorption unit; and a first electrode and second electrode that are positioned facing one another. The first electrode is formed on a first surface of a pyroelectric substrate in the thickness dimension, and the second electrode is formed on a second face of the pyroelectric substrate in the thickness dimension. The pyroelectric infrared sensor element is further equipped with: an output terminal part having a first output terminal and a second output terminal formed on the pyroelectric substrate; a first wiring part that connects the first output terminal to the first electrode; and a second wiring part that connects the second output terminal to the second electrode. The first wiring part is equipped with connective wiring constituting an electrically conductive layer that connects the to the first electrode and the first output terminal formed on the first surface, and cancellation wiring that cancels the electric charge generated in the connective wiring due to temperature changes in the pyroelectric substrate. The cancelation wiring constitutes an electrically conductive layer formed on the second surface so as to be electrically insulated from the second electrode, and electrically connected to the connective wiring.