| 摘要 |
PURPOSE: A displacement sensor is provided to enable relative position information to be obtained by the interfering light of reflective light form a target and reflective light from a reflecting member. CONSTITUTION: A displacement sensor(100) comprises a light source(1), a first beam splitter(3), a reflective member(8), objective lens(5), a first light receiving unit(30), a relative position information output unit(60), a second beam splitter(20), an astigmatism generator(10), a second light receiving unit(40), and an absolute position information output unit(50). The first beam splitter splits light emitted from the light source to two beams. The reflective member reflects the first beam split by the first beam splitter. The objective lens condenses the second beam split by the first beam splitter onto a target.
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