EFFUSION CELL HAVING STRUCTURE FOR PREVENTING SPATTERING OF SOURCE

摘要

PURPOSE: A device for evaporation source equipping structure for source protect is provided to control the temperature of a crucible while controlling the deposition amount and uniformity of the organic source. CONSTITUTION: A device for evaporation source equipping structure for source protect comprises a crucible(110), a heating source(120) and a molecular beam cutting part(130). A source material is saved in a crucible. The crucible comprises an opening(112) in one side. The heating source supplies heat to the crucible. The heating source heats the source material. The molecular beam cutting part is arranged in order to interrupt the crucible inside and the opening. The molecular beam cutting part comprises a hole or a channel. The hole or the channel emits the source material, evaporated in the crucible, to outside.