| 摘要 |
PURPOSE: A method for manufacturing a black body on a thermopile sensor is provided to improve the sensitivity and the output of a sensor by making a black body with a cobalt or a carbon. CONSTITUTION: In a method for manufacturing a black body on a thermopile sensor, a first oxide film(11) is formed on a silicon substrate(10). A nitride film(12) is formed on the first oxide film. A second oxide film(13) is formed on the nitride film. A thermocouple is formed in the top of the second oxide film. The thermocouple comprises a first thermoelectric element(14) and a second thermoelectric element(15). An insulating layer(16) and a pad(17) are formed in the top of a thermocouple.
|
