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发明名称
METHOD OF MANUFACTURING A PACKAGED VACUUM MICROELECTRONIC DEVICE
摘要
申请公布号
IL174681(A)
申请公布日期
2011.12.29
申请号
IL20060174681
申请日期
2006.03.30
申请人
INTEVAC, INC.
发明人
分类号
H01J5/02;H01J7/18;H01J9/26;H01J29/86;H01J29/94;H01J31/50
主分类号
H01J5/02
代理机构
代理人
主权项
地址
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