发明名称 POSITION DETECTION DEVICE, TWO-DIMENSIONAL POSITION MEASURING APPARATUS, OPTICAL APPARATUS AND POSITION DETECTION METHOD
摘要 A position detection device includes a magnet and a magnetic detector. The magnet includes a first pole, a second pole, a third pole and a fourth pole. The first pole and the second pole are arranged spaced apart from each other and have a same magnetic polarity. The third pole and the fourth pole are arranged spaced apart from each other and have a magnetic polarity different from the magnetic polarity of the first pole and the second pole. The first pole faces the third pole. The second pole faces the fourth pole. The magnetic detector is configured to detect magnetism of the first pole, the second pole, the third pole, and the fourth pole.
申请公布号 US2011316528(A1) 申请公布日期 2011.12.29
申请号 US201113231047 申请日期 2011.09.13
申请人 MATSUMOTO TSUYOSHI;NIKON CORPORATION 发明人 MATSUMOTO TSUYOSHI
分类号 G01B7/14 主分类号 G01B7/14
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