发明名称 LIGHT PIPE ETCH CONTROL FOR CMOS FABRICATION
摘要 In accordance with at least some embodiments of the present disclosure, a process for fabricating a light pipe (LP) is described. The process may be configured to construct a semiconductor structure having an etch-stop layer above a photodiode region and a first dielectric layer above the etch-stop layer. The process may be configured to etch a LP funnel through the first dielectric layer. And the process may be further configured to stop the etching of the LP funnel upon reaching and removing of the etch-stop layer.
申请公布号 US2011316106(A1) 申请公布日期 2011.12.29
申请号 US20100826655 申请日期 2010.06.29
申请人 KIM KIHONG;HIMAX IMAGING, INC. 发明人 KIM KIHONG
分类号 H01L31/0232;H01L31/18 主分类号 H01L31/0232
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