| 发明名称 |
PIEZOELECTRIC FILM AND PIEZOELECTRIC DEVICE |
| 摘要 |
A piezoelectric film includes crystals of a complex oxide having a perovskite structure with (100)-preferred orientation and represented as: Pb1+δ[(ZrxTi1-x)1-yNby]Oz, where x is a value in a range of 0<x<1, y is a value in a range of 0.13≦̸y≦̸0.25, and δ and z are values within ranges where the perovskite structure is obtained and δ=0 and z=3 are standard, wherein a ratio between a diffraction peak intensity I(100) from a perovskite (100) plane and a diffraction peak intensity I(200) from a perovskite (200) plane as measured by X-ray diffraction satisfies I(100)/I(200)≧1.25. |
| 申请公布号 |
US2011316393(A1) |
申请公布日期 |
2011.12.29 |
| 申请号 |
US201113168011 |
申请日期 |
2011.06.24 |
| 申请人 |
NAONO TAKAYUKI;ARAKAWA TAKAMI |
发明人 |
NAONO TAKAYUKI;ARAKAWA TAKAMI |
| 分类号 |
H01L41/04;C23C14/34;H01L41/187 |
主分类号 |
H01L41/04 |
| 代理机构 |
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