发明名称 |
COMPOUND, RESIN AND PHOTORESIST COMPOSITION |
摘要 |
The present invention provides a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, A1 represents a single bond or *—(CH2)m—CO—O—in which m represents an integer of 1 to 4 and * represents a binding position to—O—, B1 represents—O—or—S—, B2 represents—CH2—,—O—or—S—and W1 represents an optionally substituted aromatic ring, a resin comprising a structural unit derived from the compound and a photoresist composition comprising the resin.
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申请公布号 |
US2011318690(A1) |
申请公布日期 |
2011.12.29 |
申请号 |
US201113168480 |
申请日期 |
2011.06.24 |
申请人 |
YAMASHITA YUKO;KIM HYUNGJOO;SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
YAMASHITA YUKO;KIM HYUNGJOO |
分类号 |
G03F7/38;C07C69/66;C07D311/02;C07D327/06;C07D333/16;C08F20/30;C08F20/38;C08F28/06;G03F7/004 |
主分类号 |
G03F7/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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