发明名称 COMPOUND, RESIN AND PHOTORESIST COMPOSITION
摘要 The present invention provides a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, A1 represents a single bond or *—(CH2)m—CO—O—in which m represents an integer of 1 to 4 and * represents a binding position to—O—, B1 represents—O—or—S—, B2 represents—CH2—,—O—or—S—and W1 represents an optionally substituted aromatic ring, a resin comprising a structural unit derived from the compound and a photoresist composition comprising the resin.
申请公布号 US2011318690(A1) 申请公布日期 2011.12.29
申请号 US201113168480 申请日期 2011.06.24
申请人 YAMASHITA YUKO;KIM HYUNGJOO;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 YAMASHITA YUKO;KIM HYUNGJOO
分类号 G03F7/38;C07C69/66;C07D311/02;C07D327/06;C07D333/16;C08F20/30;C08F20/38;C08F28/06;G03F7/004 主分类号 G03F7/38
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