发明名称 |
MICRO-ELECTRO-MECHANICAL SYSTEM |
摘要 |
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending. |
申请公布号 |
CA2787130(A1) |
申请公布日期 |
2011.12.29 |
申请号 |
CA20112787130 |
申请日期 |
2011.06.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STAMPER, ANTHONY;JAHNES, CHRISTOPHER VINCENT |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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