| 发明名称 |
A SUBSTRATE HOLDER DETACHING DEVICE AND METHOD |
| 摘要 |
<p>PURPOSE: A substrate holder detaching device and a method thereof are provided to implement stable a deposition process by holding a substrate. CONSTITUTION: In a substrate holder detaching device and a method thereof, an absorbing body comprises a pore in the top and bottom respectively. A nozzle(500) is connected to one side of the absorbing body and is connected to a vacuum pump. A substrate is detachable from the other side of the absorbing body.</p> |
| 申请公布号 |
KR20110139557(A) |
申请公布日期 |
2011.12.29 |
| 申请号 |
KR20100059712 |
申请日期 |
2010.06.23 |
| 申请人 |
YAS CO., LTD. |
发明人 |
JEONG, KWANG HO;CHOI, MYUNG WOON;KIM, HYUNG MIN;JEON, OK CHUL;NA, YOUNG HYUCK;HWANG, SE WOON |
| 分类号 |
H01L21/677;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
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